A colloid micro-thruster system

被引:24
作者
Xiong, JJ
Zhou, ZY
Ye, XY
Wang, XH
Feng, YY
Li, YH
机构
[1] Univ Neuchatel, Inst Microtechnol, Sensors Actuators & Microsyst Lab, CH-2007 Neuchatel, Switzerland
[2] Tsing Hua Univ, Dept Precis Instruments & Mechanol, Beijing, Peoples R China
关键词
colloid micro-thruster; PCB; micro-pump; micro-thrust measurement;
D O I
10.1016/S0167-9317(02)00466-5
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A PCB (print circuit board)-based micro-thruster and a silicon micro-pump are fabricated and integrated into a novel colloid micro-thruster system. The system works on an electrical colloid propulsion principle. A silicon micro-pump is designed and fabricated as the propellant supplying unit of the micro-thruster system, which obtains the maximal volume-flow rate up to 300 mul/min and the minimum down to 10 mul/min, with the flow control precision better than mul/min. The micro-thruster is fabricated with PCB processing technology, which is simpler and cost-cheaper, compared with other micromachining technologies. For the measurement of micro-thrust, an experiment set-up based on vibration test is developed and applied for the thruster system. The primary test results show that the PCB-based colloid micro-thruster can produce controllable thrust up to the order of RN. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1031 / 1037
页数:7
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