Integrated sensor array for gas analysis in combustion atmospheres

被引：15

作者：

Getino, J

Gutierrez, J

Ares, L

Robla, JI

Horrillo, MC

Sayago, I

Agapito, JA

机构：

[1] CSIC,LAB SENSORAS,MADRID 28006,SPAIN

[2] UNIV COMPLUTENSE MADRID,FAC CIENCIAS FIS,DEPT ELECT,E-28040 MADRID,SPAIN

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 33卷 / 1-3期

关键词：

gas analysis; combustion; semiconductor-based sensor;

D O I：

10.1016/0925-4005(96)01840-0

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A semiconductor-based sensor array has been developed for highly toxic gas analysis in atmospheres with low oxygen content and in the presence of humidity and corrosive gases. The device consists of 16 discrete sensing elements formed by tin oxide thin layers deposited by sputtering. The sensor array was exposed to a gas mixture formed by N-2, O-2, CO2, H2S, HF, HCl and water vapour with a constant flow rate of 500 ml min(-1). Once their electric resistance at different temperatures between 150 degrees C and 350 degrees C was stabilized, the response to polluting gases coming from combustion processes (NOx, SO2, C6H6) was studied.

引用

页码：128 / 133

页数：6

共 15 条

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