Nanometer-sized optical waveguides fabricated by anodic oxidation using a scanning near-field optical microscope

被引:20
作者
Onuki, T [1 ]
Tokizaki, T
Watanabe, Y
Tsuchiya, T
Tani, T
机构
[1] Natl Inst Adv Ind Sci & Technol, Nanotechnol Res Inst, Tsukuba, Ibaraki 3058568, Japan
[2] Sci Univ Tokyo, Chiba 2788510, Japan
[3] Tokyo Univ Agr & Technol, Tokyo 848588, Japan
关键词
D O I
10.1063/1.1486479
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have fabricated an optical waveguide with a subwavelength cross section that propagates light. A metal-oxide core is partially embedded into a metal clad by anodic oxidation using the probe tip of a scanning near-field optical microscope (SNOM). Then, using the SNOM in transmission mode we have evidence of light propagating more than 5 mum in the waveguide whose core width and thickness are 300 and 70 nm, respectively. (C) 2002 American Institute of Physics.
引用
收藏
页码:4629 / 4631
页数:3
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