Nanoscale replication for scanning probe data storage

被引:65
作者
Terris, BD [1 ]
Mamin, HJ [1 ]
Best, ME [1 ]
Logan, JA [1 ]
Rugar, D [1 ]
Rishton, SA [1 ]
机构
[1] IBM CORP,DIV RES,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1063/1.116965
中图分类号
O59 [应用物理学];
学科分类号
摘要
Recently, there have been significant advances in demonstrating the possible application of scanning probe techniques for high density data storage. While many obstacles have yet to be overcome, one of the more promising applications of such devices is for very high density read-only disk drives. Such an application requires the means to pattern and replicate nanometer scale features over macroscopic dimensions. We have developed a technique for both mastering and replicating data patterns for use in such a device at a density 100 times that of current read-only disks. The process consists of using electron beam lithography to write data features as small as 50 nm and a photopolymerization process to faithfully replicate the written marks. (C) 1996 American Institute of Physics.
引用
收藏
页码:4262 / 4264
页数:3
相关论文
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