Structure of thin SiO2 films grown on Mo(112) -: art. no. 155404

被引:102
作者
Chen, MS [1 ]
Santra, AK [1 ]
Goodman, DW [1 ]
机构
[1] Texas A&M Univ, Dept Chem, College Stn, TX 77842 USA
关键词
D O I
10.1103/PhysRevB.69.155404
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ultra-thin SiO2 films were prepared by evaporating Si onto a Mo(112) surface followed by oxidation and annealing up to 1200 K. The surface structure and film quality were investigated by low-energy electron diffraction (LEED), Auger spectroscopy (AES), and high-resolution electron energy loss spectroscopy (HREELS). A well-ordered, monolayer Mo(112)-c(2x2)-SiO2 structure was characterized by HREELS and shown to exhibit unique phonon features compared to bulk SiO2. The phonon features are assigned to Si-O-Mo rather than Si-O-Si species, and the surface structure determined to be Mo(112)-c(2x2)-[SiO4] where each of the four oxygen atoms bonds to the substrate Mo atoms.
引用
收藏
页码:155404 / 1
页数:7
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