Preparation of piezoelectric thick films using a jet printing system

Pb(Zr,Ti)O-3 piezoelectric thick films mere prepared on Pt/Cr/SiO2/Si substrate using an improved jet printing system (JPS). X-ray diffraction (XRD) and scanning electron microscopy (SEM) analysis and measurements of electrical properties, including dielectricity, ferroelectricity and piezoelectricity, were carried out on these films. A very high deposition rate of 3 mu m/min and films with thicknesses above 100 mu m were obtained without peeling. However? the films prepared in this fashion demonstrate lower piezoelectric behavior than bulk PZT ceramics. The reason for this has been explored using element analysis. Furthermore, we have developed a mask depositing technique as a surface leveling.