Microengineering - Macro power from micro machinery

被引:213
作者
Epstein, AH [1 ]
Senturia, SD [1 ]
机构
[1] MIT, DEPT ELECT ENGN & COMP SCI, CAMBRIDGE, MA 02139 USA
关键词
D O I
10.1126/science.276.5316.1211
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
引用
收藏
页码:1211 / 1211
页数:1
相关论文
共 13 条
[1]  
EPSTEIN A, 1997, IEEE C SOL STAT SENS
[2]  
Feynman R., 1993, Journal of Microelectromechanical Systems, V2, P4, DOI 10.1109/84.232589
[3]   There's plenty of room at the bottom [J].
Feynman, Richard P. .
Journal of Microelectromechanical Systems, 1992, 1 (01) :60-66
[4]   Microfluidics - a review [J].
Gravesen, Peter ;
Branebjerg, Jens ;
Jensen, Ole Sondergard .
Journal of Micromechanics and Microengineering, 1993, 3 (04) :168-182
[5]  
Lerou JJ, 1996, DECH MONOG, V132, P51
[6]  
LIN LY, 1995, P IEEE WORKSH MICR E, P145
[7]  
MEHREGANY M, 1987, SENSOR ACTUATOR, V12, P341, DOI 10.1016/0250-6874(87)80054-9
[8]   A STUDY OF 3 MICROFABRICATED VARIABLE-CAPACITANCE MOTORS [J].
MEHREGANY, M ;
BART, SF ;
TAVROW, LS ;
LANG, JH ;
SENTURIA, SD ;
SCHLECHT, MF .
SENSORS AND ACTUATORS A-PHYSICAL, 1990, 21 (1-3) :173-179
[9]  
Samples Random, 1997, SCIENCE, V275, P1571
[10]  
SPEARING SM, IN PRESS P 21 COC BE