A new light trapping TCO for nc-Si:H solar cells

被引:119
作者
Selvan, J. A. Anna
Delahoy, Alan E.
Guo, Sheyu
Li, Yuan-Min
机构
[1] NanoPV Corp, Ewing, NJ 08618 USA
[2] Energy Photovolta Inc, Princeton, NJ 08543 USA
关键词
thin film solar cells; TCO; light trapping; microcrystalline silicon (mu c-Si : H); nano-crystalline silicon (nc-Si : H); charge carrier mobility; ZnO; IMO; molybdenum doped tin oxide; ITO;
D O I
10.1016/j.solmat.2005.09.018
中图分类号
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号
0807 ; 0820 ;
摘要
A new transparent conducting light trapping structure with no free carrier absorption for solar cells is described. Indium oxide doped with molybdenum (IMO), prepared by the hollow cathode sputtering technique, exhibits high charge-carrier mobility up to 80 cm(2)/V s. No free-carrier absorption in the near infrared region has been found in the IMO. The superior long-wavelength transparency, however, is not sufficient for thin film Si solar cell applications. To obtain the highest possible short circuit current, the TCO needs to possess additional light trapping structure. Anisotropic etching of fiber texture oriented ZnO has been shown to result in an effective light trapping structure. Here we propose a bilayer structure that consists of light trapping-intrinsic ZnO and IMO (the ZnO/IMO bilayer). Both layers show low free-carrier absorption up to the wavelength of 1200 nm. We demonstrate the use of such a transparent conducting light trapping oxide (TCLO) in nanocrystalline (nc-Si:H) solar cells fabricated by a single chamber, batch-type PECVD process. Incorporation of such a transparent conducting light trapping bilayer can increase solar cell short-circuit current density (J(SC)) by > 30% compared to flat bilayers. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:3371 / 3376
页数:6
相关论文
共 5 条
[1]   Reactive-environment, hollow cathode sputtering:: Basic characteristics and application to Al2O3, doped ZnO, and In2O3:MO [J].
Delahoy, AE ;
Guo, SY ;
Paduraru, C ;
Belkind, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04) :1697-1704
[2]  
Meng Y, 2001, THIN SOLID FILMS, V394, P219
[3]  
Selvan JA, 2000, P 16 EUR PHOT SOL EN, p187ff
[4]  
Selvan JAA, 1997, MATER RES SOC SYMP P, V472, P39
[5]  
SELVAN JAA, 1997, ZNO THIN FILM SOLAR