共 5 条
[1]
Reactive-environment, hollow cathode sputtering:: Basic characteristics and application to Al2O3, doped ZnO, and In2O3:MO
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,
2004, 22 (04)
:1697-1704
[2]
Meng Y, 2001, THIN SOLID FILMS, V394, P219
[3]
Selvan JA, 2000, P 16 EUR PHOT SOL EN, p187ff
[4]
Selvan JAA, 1997, MATER RES SOC SYMP P, V472, P39
[5]
SELVAN JAA, 1997, ZNO THIN FILM SOLAR