Integrating micro- and nanoelectrodes into atomic force microscopy cantilevers using focused ion beam techniques

This paper concerns a scanning probe capable of simultaneously measuring topography and local electrochemistry at a sample surface. Our approach ensures the distance regulation of the electrode by maintaining a fixed working distance between the probe and the sample surface independent from the electrochemical response. This is achieved by integrating micro- and nanoelectrodes into atomic force microscopy tips using focused ion beam techniques. The feasibility and functionality of the fully featured tip is demonstrated by a simultaneous topographical and electrochemical measurement of a porous polymer membrane as model surface. (C) 2002 American Institute of Physics.