Reaction of Al with ammonia by pulsed laser ablation: Optical analysis and mass spectrometry

被引：6

作者：

DiPalma, TM

Flamini, C

Orlando, S

Teghil, R

Guidoni, AG

Mele, A

机构：

[1] UNIV ROMA LA SAPIENZA,DIPARTIMENTO CHIM,I-00185 ROME,ITALY

[2] CNR,IST MAT SPECIALI,I-85050 TITO,PZ,ITALY

[3] UNIV BASILICATA,DIPARTIMENTO CHIM,I-80100 POTENZA,ITALY

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1997年 / 122卷 / 03期

关键词：

D O I：

10.1016/S0168-583X(96)00573-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

In situ techniques have been employed to characterize laser plasma (plume) formation and reactions in the gas cloud formed from Al and NH3, Optical emission imaging and spectroscopy, and time of flight mass spectrometry have been used to monitor ablation plume components. AlN films have been synthesized by reaction of laser evaporated Al in a NH3 atmosphere. Optical multichannel emission spectroscopy (OMA) and intensified charge coupled device (ICCD) imaging have been applied to identification of the deposition precursors occurring in the plasma.

引用

页码：423 / 426

页数：4

共 10 条

[1] COMPOSITION AND GAS-DYNAMICS OF LASER-ABLATED AIN PLUMES [J].