Formation of TiO2 and ZrO2 nanotubes using atomic layer deposition with ultraprecise control of the wall thickness

被引：242

作者：

Shin, HJ

Jeong, DK

Lee, JG

Sung, MM

Kim, JY

机构：

[1] Kookmin Univ, Sch Adv Mat Engn, Seoul 136702, South Korea

[2] Kookmin Univ, Dept Chem, Seoul 136702, South Korea

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 14期

关键词：

D O I：

10.1002/adma.200306296

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Nanotubes of TiO2 and ZrO2 (see Figure) with diameters of ca. 30-200 nm have been successfully fabricated by atomic layer deposition in a one-step process utilizing nanoporous membranes (commercial polycarbonate filters) as templates. Sub-angstrom wall thickness control and high aspect ratios can be achieved by this method.

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页码：1197 / +

页数：5

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