Theoretical and experimental study on ozone generation characteristics of an oxygen-fed ozone generator in silent discharge

Experimental and theoretical investigations have been carried out on the ozone generation characteristics of oxygen-fed ozone generators with various discharge gap lengths. In this paper, a new theoretical model considering the dependence of ozone dissociation rate by electron impact on the electric field strength is suggested. Assuming a stationary and uniform discharge in time and space, ozone concentrations obtained experimentally under various discharge power densities and gas pressures are well explained by this model. It is concluded that the operation under a high electric field has a potential advantage in producing high-concentration ozone efficiently because of the reduction in the population density of low-energy electrons which decompose generated ozone.