Processing of chemical solution deposited Ca-modified PbTiO3 films for high frequency components and dynamic random access memories

被引：6

作者：

Bretos, I ^{[1
]}

Ricote, J ^{[1
]}

Jiménez, R ^{[1
]}

Mendiola, J ^{[1
]}

Calzada, ML ^{[1
]}

机构：

[1] CSIC, Inst Ciencia Mat Madrid, E-28049 Madrid, Spain

来源：

INTEGRATED FERROELECTRICS | 2004年 / 61卷

关键词：

chemical solution deposition; lead titanate; memories; tunability;

D O I：

10.1080/10584580490458748

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Diol-based sol-gel processes have been used for the synthesis of calcium modified lead titanate, CaxPb1-xTiO3 (PCT), solutions with x = 0.5. Single perovskite films have been obtained on Pt/TiO2/SiO2/(100)Si substrates. Dielectric properties of the films have been measured to evaluate their applicability in dynamic random access memories (DRAMs) and high frequency (HF) components.

引用

页码：105 / 110

页数：6

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