共 7 条
[2]
Design of fan-out kinoforms in the entire scalar diffraction regime with an optimal-rotation-angle method
[J].
APPLIED OPTICS,
1997, 36 (32)
:8435-8444
[3]
Low energy ion beam etching of InP using methane chemistry
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1998, 16 (03)
:1018-1023