Influence of laser and isothermal treatments on microstructural properties of SnO2 films

被引：20

作者：

Rembeza, ES

Richard, O

Van Landuyt, J

机构：

[1] Voronezh State Univ, Dept Solid State Phys, Voronezh 394693, Russia

[2] Univ Antwerp, RUCA, Dept Phys, EMAT, B-2020 Antwerp, Belgium

来源：

MATERIALS RESEARCH BULLETIN | 1999年 / 34卷 / 10-11期

关键词：

thin films; electron microscopy; X-ray diffraction; microstructure;

D O I：

10.1016/S0025-5408(99)00188-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

SnO2 thin films doped with Sb (ca. 3%) were deposited on glass and silicon substrates by magnetron sputtering and heat-treated by laser or isothermal treatment. The films were characterized for their composition, morphology, and crystalline structure by X-ray diffraction (XRD) and transmission electron microscopy (TEM). It was found that the tin oxide films consisted only of the SnO2 tetragonal phase; they were well crystallized and no microstructural defects were observed. The average grain size of the laser-treated films was approximately 6.3-8.9 nm, which is 2 times smaller than the grain size of the isothermally treated films. (C) 2000 Elsevier Science Ltd.

引用

页码：1527 / 1533

页数：7

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