Two-dimensional radio-frequency methane plasma simulation: Comparison with experiments

Plasma variables are predicted using a glow discharge physics model and compared with experimental data obtained from plasma assisted chemical vapor deposition (PACVD) reactors. The present study provides insights to charged species dynamics and their effects on deposition in a polyatomic gas (methane) discharge. Swarm data as a function of electron energy are provided as input to the model, The necessary de bias for the discharge is also predicted such that the cycle-averaged current to the powered electrode becomes zero, The simulations are performed for the operating conditions of two different experimental reactors. The model predictions of electron density, self-generated de bias, and power requirement compare very well with the experimental results. The model predictions of axial and radial variations of plasma density also compare well with the. experimental data. The radial and axial variations of plasma variables in the reactors are also presented.