Two-photon-absorbed photopolymerization for three-dimensional microfabrication

被引：22

作者：

Maruo, S

Kawata, S

机构：

来源：

MEMS 97, PROCEEDINGS - IEEE THE TENTH ANNUAL INTERNATIONAL WORKSHOP ON MICRO ELECTRO MECHANICAL SYSTEMS: AN INVESTIGATION OF MICRO STRUCTURES, SENSORS, ACTUATORS, MACHINES AND ROBOTS | 1997年

关键词：

D O I：

10.1109/MEMSYS.1997.581794

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An experimental system for the microfabrication has been developed with a Ti:sapphire laser that has an oscillating wavelength as 770 nm and a 130 fs pulse width. The usefulness of the proposed method has been verified by fabrication of several kinds of microstructure by use of a resin consisting of photoinitiators, urethane acrylate monomers and urethane acrylate oligomers.

引用

页码：169 / 174

页数：6