Spatially Resolved Measurements of Argon Metastable (1s5) Density in a High Pressure Microdischarge Using Diode Laser Absorption Spectroscopy

被引:54
作者
Belostotskiy, Sergey G. [1 ]
Donnelly, Vincent M. [1 ]
Economou, Demetre J. [1 ]
Sadeghi, Nader [2 ]
机构
[1] Univ Houston, Dept Chem & Biomol Engn, Plasma Proc Lab, Houston, TX 77204 USA
[2] Univ Grenoble 1, Spectrometrie Phys Lab, UMR C5588, F-38402 St Martin Dheres, France
关键词
Argon microdischarge; atmospheric pressure microplasma; diode laser absorption spectroscopy; metastable density; plasma diagnostics; ELECTRON-IMPACT EXCITATION; CROSS-SECTIONS; PLASMA; ATOMS; LINES;
D O I
10.1109/TPS.2009.2015949
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Tunable diode laser absorption spectroscopy was employed to measure the spatially resolved density of argon metastables (1s(5)) in a high-pressure direct-current argon microdischarge. Analysis of absorption lineshapes provided the gas temperature. The metastable density peaked near the cathode and decayed rapidly in the bulk plasma. The metastable density increased with increasing pressure but decreased with increasing discharge current. Neutral gas heating and the resulting drop in gas density were responsible for the metastable density decrease with increasing current.
引用
收藏
页码:852 / 858
页数:7
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