Hydrothermal synthesis of PbTiO3 films

被引:33
作者
Cho, WS
Yoshimura, M
机构
[1] TOKYO INST TECHNOL,MAT & STRUCT LAB,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN
[2] TOKYO INST TECHNOL,ENGN MAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 226,JAPAN
关键词
LEAD-ZIRCONATE-TITANATE; THIN-FILM; ELECTROCHEMICAL METHOD; SILICON;
D O I
10.1557/JMR.1997.0121
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Well-crystallized polycrystalline films of tetragonal PbTiO3 have been synthesized on Ti metal substrates in concentrated alkaline solutions of Pb(OH)(2) containing KOH by the hydrothermal method under saturated vapor pressure (2.0 MPa) at 200 degrees C. The film microstructure depended strongly on the Pb(OH)(2) and KOH concentration. The grain size became larger from approximately 0.6 to 6 mu m with an increase of KOH concentration from 1 to 4 M at 0.07 M Pb(OH)(2), whereas the grains decreased in size with an increase of Pb(OH)2 concentration at 1 M KOH concentration. PbTiO3 film prepared in the aqueous solution of 0.07 M Pb(OH)(2) containing 2 M KOH showed a relative dielectric constant of about 215 and loss of about 5% at 1 kHz.
引用
收藏
页码:833 / 839
页数:7
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