Pulsed laser ablation of NbN/MgO/NbN multilayers

被引：27

作者：

Cappuccio, G

Gambardella, U

Morone, A

Orlando, S

Parisi, GP

机构：

[1] CNR, IST MAT SPEDALI, I-85050 TITO, POTENZA, ITALY

[2] CNR, IST STRUTTURIST CHIM, I-00016 MONTEROTONDO, ROME, ITALY

[3] IST NAZL FIS NUCL, LAB NAZL FRASCATI, I-00044 FRASCATI, ROME, ITALY

来源：

APPLIED SURFACE SCIENCE | 1997年 / 109卷

关键词：

D O I：

10.1016/S0169-4332(96)00758-1

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

NbN/MgO/NbN multilayers have been grown by pulsed laser ablation in pure N-2 and O-2 atmospheres. A Nd:YAG laser, operating at lambda=532 nm, pulse width 10 ns, and energy density in the range 1-2.5 J/cm(2), was used. The laser beam was focused at an angle of 45 degrees on Nb and Mg metallic targets. A rotating multiple-target holder system allowed in-situ depositions of the multilayers. The samples were grown on SrTiO3 (100) substrates 5 cm from the target and held at 550 degrees C (NbN) and 250 degrees C (MgO). The morphology and structure of the deposited multilayers were verified by XRD, EDS, as well as electrical measurements.

引用

页码：399 / 402

页数：4

共 8 条

[1] NbN superconducting thin films grown by pulsed laser ablation [J].