Nano-pore silicon membrane characterization by diffusion and electrical resistance

被引：14

作者：

Carbonaro, A

Walczak, R

Calderale, PM

Ferrari, M

机构：

[1] Politecn Torino, Dept Mech Engn, I-10129 Turin, Italy

[2] iMEDD Inc, Columbus, OH 43212 USA

[3] Ohio State Univ, Biomed Engn Ctr, Columbus, OH 43210 USA

来源：

JOURNAL OF MEMBRANE SCIENCE | 2004年 / 241卷 / 02期

关键词：

silicon membrane; quality control (QC); glucose diffusion; electrical conductance; membrane pore area;

D O I：

10.1016/j.memsci.2004.04.039

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

An inexpensive, non destructive and rapid quality control (QC) procedure for nano-pore silicon membranes is presented. Membranes with different pore sizes were characterized in terms of glucose diffusion and by electrical resistance measurements. Electrical resistance results versus membrane pore size allowed to trace a reference curve to be used to verify the machining process. Diffusion was plotted versus conductance data. An experimental linear relationship was determined, which allows to predict the membrane diffusion properties without running destructive diffusion tests. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：249 / 255

页数：7

共 10 条

[1] Silicon membrane nanofilters from sacrificial oxide removal [J].