Functional and technological integration of measurement microsystems

被引：8

作者：

Barwicz, A ^{[1
]}

机构：

[1] Univ Quebec, Dept Elect Engn, St Foy, PQ G1V 2M3, Canada

[2] Univ Quebec, Measuring Syst Lab, St Foy, PQ G1V 2M3, Canada

来源：

IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE | 2004年 / 7卷 / 02期

关键词：

D O I：

10.1109/MIM.2004.1304561

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 [电气工程]; 0809 [电子科学与技术];

摘要：

The field of measurement microsystems has progressed with advances in the fields of microelectronics, micromechanics, microoptics, and digital signal processing (DSP). In this article, I summarize a unified conceptual basis for measurement microsystems, discuss some specifics of integration, and describe an innovative approach to the development of a micro-optoelectrical system (MOEMS), a microspectrometer on a chip. This example highlights the complexity of the problem of transition from a successful laboratory concept proof to a product that can be manufactured.

引用

页码：14 / 19

页数：6

共 24 条

[1]

[Anonymous], [No title captured]

[2]

[Anonymous], [No title captured]

[3]

AN APPLICATION-SPECIFIC PROCESSOR DEDICATED TO KALMAN-FILTER-BASED CORRECTION OF SPECTROMETRIC DATA [J].

BARWICZ, A ;

MASSICOTTE, D ;

SAVARIA, Y ;

PANGO, PA ;

MORAWSKI, RZ .

IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 1995, 44 (03) :720-724

[4]

BARWICZ A, 1994, C P 10 ISPE IFAC INT, P203

[5]

BARWICZ A, 1985, MEAS J IMEKO, V34, P525

[6]

*CA W RES U MCNC, 1993, MICR SYST MULT MEMS

[7]

FUNDAMENTAL CONCEPTS OF MEASUREMENT - DEFINITION AND SCALES [J].

FINKELSTEIN, L .

MEASUREMENT AND CONTROL, 1975, 8 (03) :105-111

[8]

FRANK R, 1995, UNDERSTANDING SMART

[9]

*INT VOC BAS GEN T, 1987, CANCGSB15811987

[10]

JANSON PA, 1984, DECONVOLUTION APPL S

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