Phase decomposition of a binary thin film on a patterned substrate

被引:16
作者
Johnson, WC [1 ]
Wise, SM [1 ]
机构
[1] Univ Virginia, Dept Mat Sci & Engn, Charlottesville, VA 22904 USA
关键词
D O I
10.1063/1.1497193
中图分类号
O59 [应用物理学];
学科分类号
摘要
Two-dimensional simulations of phase decomposition in a binary thin film, which is deposited on a patterned substrate, are performed using the Cahn-Hilliard equation. Phase formation, growth, coarsening, and the resulting two-phase microstructure are strongly influenced by the substrate geometry, film composition, and surface effects. Patterning the substrate can result in the formation of self-organized structures of various sizes and spacings and may provide a method for developing monolayers of periodic nanostructures from an initially homogeneous alloy. (C) 2002 American Institute of Physics.
引用
收藏
页码:919 / 921
页数:3
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