Precise wavelength control for DFB laser diodes by novel corrugation delineation method

被引：43

作者：

Muroya, Y

Nakamura, T

Yamada, H

Torikai, T

机构：

[1] Kansai Electronics Res. Laboratory, NEC Corporation, Otsu 520, 2-9-1, Seiran

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1997年 / 9卷 / 03期

关键词：

distributed feedback lasers; electron beam lithography; gratings; semiconductor laser arrays; wavelength division multiplexing;

D O I：

10.1109/68.556049

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Precise wavelength control of a multiple-wavelength DFB laser-diode (LD) array was achieved using weighted-dose allocation variable-pitch EB-lithography (WAVE) and highly uniform MOVPE. Multiple-wavelength 1.3 mu m lambda/4-shifted DFB LD arrays with wavelength spacing of 2.0 nm were successfully demonstrated. The standard deviation of the wavelength was as low as 0.37 nm over 2-in wafers.

引用

收藏

页码：288 / 290

页数：3

相关论文

共 8 条

[1] LOW-THRESHOLD LAMBDA=1.3 MU-M MULTIQUANTUM-WELL LASER-DIODES GROWN BY METALORGANIC VAPOR-PHASE EPITAXY USING TERTIARYBUTYLARSINE AND TERTIARYBUTYLPHOSPHINE PRECURSORS [J].

AE, S ;

TERAKADO, T ;

NAKAMURA, T ;

TORIKAI, T ;

UJI, T .

JOURNAL OF CRYSTAL GROWTH, 1994, 145 (1-4) :852-857

[2] MULTIPLE-PHASE-SHIFT SUPERSTRUCTURE GRATING DBR LASERS FOR BROAD WAVELENGTH TUNING [J].

ISHII, H ;

TOHMORI, Y ;

YOSHIKUNI, Y ;

TAMAMURA, T ;

KONDO, Y .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1993, 5 (06) :613-615

[3] THE EFFECT OF STITCHING ERRORS ON THE SPECTRAL CHARACTERISTICS OF DFB LASERS FABRICATED USING ELECTRON-BEAM LITHOGRAPHY [J].

KJELLBERG, T ;

SCHATZ, R .

JOURNAL OF LIGHTWAVE TECHNOLOGY, 1992, 10 (09) :1256-1256

[4] GAAS/ALGAAS 1ST-ORDER GRATINGS FABRICATED WITH ELECTRON-BEAM LITHOGRAPHY AND VERY-NARROW-LINEWIDTH LONG-CAVITY DBR LASER-DIODES [J].

SUEHIRO, M ;

HIRATA, T ;

MAEDA, M ;

HIHARA, M ;

HOSOMATSU, H .

IEEE JOURNAL OF QUANTUM ELECTRONICS, 1993, 29 (06) :2081-2087

[5] Focused ion beam lithography of multiperiod gratings for a wavelength-division-multiplexed transmitter laser array [J].

Templeton, IM ;

Fallahi, M ;

Erickson, LE ;

Chatenoud, F ;

Koteles, ES ;

Champion, HG ;

He, JJ ;

Barber, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06) :2722-2724

[6] MULTIWAVELENGTH DISTRIBUTED-BRAGG-REFLECTOR LASER ARRAY FABRICATED USING NEAR-FIELD HOLOGRAPHIC PRINTING WITH AN ELECTRON-BEAM GENERATED PHASE GRATING MASK [J].

TENNANT, DM ;

KOCH, TL ;

VERDIELL, JM ;

FEDER, K ;

GNALL, RP ;

KOREN, U ;

YOUNG, MG ;

MILLER, BI ;

NEWKIRK, MA ;

TELL, B .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06) :2509-2513

[7] WAVELENGTH UNIFORMITY IN LAMBDA/4 SHIFTED DFB LASER ARRAY WDM TRANSMITTERS [J].

YOUNG, MG ;

KOCH, TL ;

KOREN, U ;

TENNANT, DM ;

MILLER, BI ;

CHIEN, M ;

FEDER, K .

ELECTRONICS LETTERS, 1995, 31 (20) :1750-1752

[8] Wavelength accuracy and output power of multiwavelength DFB laser arrays with integrated star couplers and optical amplifiers [J].

Zah, CE ;

Amersfoort, MR ;

Pathak, B ;

Favire, F ;

Lin, PSD ;

Rajhel, A ;

Andreadakis, NC ;

Bhat, R ;

Caneau, C ;

Koza, MA .

IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (07) :864-866