Focused-ion-beam directed self-assembly of Cu2O islands on SrTiO3(100)

被引：26

作者：

Du, Y ^{[1
]}

Atha, S

Hull, R

Groves, JF

Lyubinetsky, I

Baer, DR

机构：

[1] Univ Virginia, Dept Mat Sci & Engn, Charlottesville, VA 22904 USA

[2] Pacific NW Natl Lab, Richland, WA 99352 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 84卷 / 25期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1765212

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Nanoscale islands of Cu2O have been synthesized on single-crystal SrTiO3 (100) substrates using oxygen plasma-assisted molecular-beam epitaxy (MBE). Island growth location has been controlled by using an ex situ Ga+ focused ion beam (FIB) to modify the growth surface in discrete locations prior to island synthesis. The FIB modifications have generated surface topography with lateral dimensions of 150-200 nm. Ex situ atomic force microscopy study after island growth reveals that certain FIB substrate modification and MBE growth condition combinations lead to directed self-assembly of metal oxide islands at the edges of the FIB modified zones. (C) 2004 American Instsitute of Physics.

引用

页码：5213 / 5215

页数：3

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