Nanostructured materials production by hypersonic plasma particle deposition

被引：48

作者：

Rao, NP

Lee, HJ

Kelkar, M

Hansen, DJ

Heberlein, JVR

McMurry, PH

Girshick, SL

机构：

[1] Department of Mechanical Engineering, University of Minnesota, Minneapolis

来源：

NANOSTRUCTURED MATERIALS | 1997年 / 9卷 / 1-8期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1016/S0965-9773(97)00035-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report on a new process for producing nanostructured materials, hypersonic plasma particle deposition (HPPD), wherein a thermal plasma seeded with vapor-phase precursors is supersonically expanded through a nozzle to nucleate ultrafine particles, which are then deposited by hypersonic impaction onto a temperature-controlled substrate. Results from preliminary experiments aimed at synthesizing nanostructured silicon are presented. (C) 1997 Acta Metallurgica Inc.

引用

页码：129 / 132

页数：4

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