Vapor phase synthesis of fine particles

被引：13

作者：

daCruz, AC

Munz, RJ

机构：

[1] Plasma Technology Research Centre (CRTP), Department of Chemical Engineering, McGill University, Montreal, PQ

来源：

IEEE TRANSACTIONS ON PLASMA SCIENCE | 1997年 / 25卷 / 05期

基金：

加拿大自然科学与工程研究理事会;

关键词：

aluminum nitride; fine particles; method of moments; nucleation and growth; plasma reactor; plasma synthesis; transferred-arc; vapor phase synthesis;

D O I：

10.1109/27.649619

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Aluminum nitride (AlN) ultrafine powder is synthesized in a new concept of plasma reactor whose reaction section is separated from the plasma chamber, Aluminum is evaporated using a transferred-are in either Ar or Ar/H-2 atmosphere. The hot gas carrying metal vapor is mixed with radial jets of NH3/Ar mixture, A mathematical model of the reaction zone is developed, which includes the calculation of fluid flow, temperature, and concentration fields, followed by the nucleation and growth of fine particles, using the method of moments, The initial results of the experimental and modeling study on the influence of temperature and nitriding jet intensity on particle size and conversion are presented, The powder produced has a specific surface area (SSA) in the range of 40-280 m(2)/g.

引用

页码：1008 / 1016

页数：9

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