Atomic resolution on Si(111)-(7x7) by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork

被引：442

作者：

Giessibl, FJ ^{[1
]}

机构：

[1] Univ Augsburg, Inst Phys, EKM, D-86135 Augsburg, Germany

来源：

APPLIED PHYSICS LETTERS | 2000年 / 76卷 / 11期

关键词：

D O I：

10.1063/1.126067

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Atomic resolution by noncontact atomic force microscopy with a self-sensing piezoelectric force sensor is presented. The sensor has a stiffness of 1800 N/m and is operated with sub-nanometer amplitudes, allowing atomic resolution with relatively bluntly etched tungsten tips. Sensitivity and noise are discussed. (C) 2000 American Institute of Physics. [S0003-6951(00)01011-1].

引用

页码：1470 / 1472

页数：3

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