Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography

被引：54

作者：

Chen, Jing ^{[1
,2
]}

Shi, Jian ^{[1
]}

Decanini, Dominique ^{[1
]}

Cambril, Edmond ^{[1
]}

Chen, Yong ^{[3
]}

Haghiri-Gosnet, Anne-Marie ^{[1
]}

机构：

[1] CNRS, Lab Photon & Nanostruct, F-91460 Marcoussis, France

[2] Northwestern Polytech Univ, Sch Mat Sci & Engn, Xian 710072, Peoples R China

[3] Ecole Normale Super, F-750005 Paris, France

来源：

MICROELECTRONIC ENGINEERING | 2009年 / 86卷 / 4-6期

关键词：

Soft UV nanoimprint lithography; Surface plasmon resonance; Sensor; Nanohole array; OPTICAL-TRANSMISSION; LIGHT;

D O I：

10.1016/j.mee.2008.12.093

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on results of fabrication and optical characterisation of sub-250 nm periodic gold nanohole arrays on glass by using UV nanoimprint lithography (UV-NIL) combined with both reactive ion etching (RIE) and Cr/Au lift-off processes. The transmission spectra of the fabricated nanolhole gratings were measured for different hole diameters and periods. We also show preliminary results of chemical sensing after surface modification of the gold hole arrays. In agreement with the theoretical prediction, we found that any change in the dielectric index of the surrounding environment of the metallic array produces a transmission peak red shift. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：632 / 635

页数：4

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