Gas deposition

被引：16

作者：

Hayashi, C

机构：

来源：

SURFACE COATINGS FOR ADVANCED MATERIALS | 1997年 / 246卷

关键词：

nano particles; deposition; electronic components; aerosol;

D O I：

10.4028/www.scientific.net/MSF.246.153

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A unique coating process using nano-particles is described with some of its applications to electronic components. The process is named Gas-Deposition. The process causes no environmental pollution. Material saving is another feature of the process. Applications in many different industries are expected.

引用

页码：153 / 179

页数：27

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