Effects of pre-treatment and plasma enhancement on chemical vapor deposition of carbon nanotubes from ultra-thin catalyst films

被引:41
作者
Cantoro, M.
Hofmann, S.
Pisana, S.
Ducati, C.
Parvez, A.
Ferrari, A. C.
Robertson, J.
机构
[1] Univ Cambridge, Dept Engn, Cambridge CB2 1PZ, England
[2] Univ Cambridge, Dept Mat Sci & Met, Cambridge CB2 3QZ, England
关键词
nanotubes; nanofibers; chemical vapor deposition; plasma CVD;
D O I
10.1016/j.diamond.2006.01.007
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report a detailed study of surface-bound chemical vapor deposition of carbon nanotubes and nanofibers from evaporated transition metal catalysts exposed to ammonia diluted acetylene. We show that a reduction of the Fe/Co catalyst film thickness below 3 nm results into a transition from large diameter (> 40 nm), bamboo-like nanofibers to small diameter (similar to 5 nm) multi-walled carbon nanotubes. The nanostructuring of ultrathin catalyst films critically depends on the gas atmosphere, with the resulting island distribution initiating the carbon nucleation. Compared to purely thermal chemical vapor deposition, we find that, for small diameter nanotube growth, DC plasma assistance is detrimental to graphitization and sample homogeneity and cannot prevent an early catalyst poisoning. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码:1029 / 1035
页数:7
相关论文
共 29 条
[1]   Carbon nanotube electronics [J].
Avouris, P ;
Appenzeller, J ;
Martel, R ;
Wind, SJ .
PROCEEDINGS OF THE IEEE, 2003, 91 (11) :1772-1784
[2]  
Baker R., 1978, CHEM PHYS CARBON
[3]   Plasma-induced alignment of carbon nanotubes [J].
Bower, C ;
Zhu, W ;
Jin, SH ;
Zhou, O .
APPLIED PHYSICS LETTERS, 2000, 77 (06) :830-832
[4]  
CANTORO M, UNPUB
[5]  
CANTORO M, 2004, P 18 INT WINT EL PRO, P81
[6]   Deposition of aligned bamboo-like carbon nanotubes via microwave plasma enhanced chemical vapor deposition [J].
Cui, H ;
Zhou, O ;
Stoner, BR .
JOURNAL OF APPLIED PHYSICS, 2000, 88 (10) :6072-6074
[7]   Initial growth of vertically aligned carbon nanofibers [J].
Cui, HT ;
Yang, XJ ;
Simpson, ML ;
Lowndes, DH ;
Varela, M .
APPLIED PHYSICS LETTERS, 2004, 84 (20) :4077-4079
[8]   The role of the catalytic particle in the growth of carbon nanotubes by plasma enhanced chemical vapor deposition [J].
Ducati, C ;
Alexandrou, I ;
Chhowalla, M ;
Robertson, J ;
Amaratunga, GAJ .
JOURNAL OF APPLIED PHYSICS, 2004, 95 (11) :6387-6391
[9]   Temperature selective growth of carbon nanotubes by chemical vapor deposition [J].
Ducati, C ;
Alexandrou, I ;
Chhowalla, M ;
Amaratunga, GAJ ;
Robertson, J .
JOURNAL OF APPLIED PHYSICS, 2002, 92 (06) :3299-3303
[10]   Self-oriented regular arrays of carbon nanotubes and their field emission properties [J].
Fan, SS ;
Chapline, MG ;
Franklin, NR ;
Tombler, TW ;
Cassell, AM ;
Dai, HJ .
SCIENCE, 1999, 283 (5401) :512-514