Two-dimensional amorphous silicon image sensor arrays

被引：20

作者：

Street, RA

Wu, XD

Weisfield, R

Ready, S

Apte, R

Ngyuen, M

Jackson, WB

Nylen, P

机构：

[1] Xerox Palo Alto Research Center, Palo Alto

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1996年 / 198卷

基金：

美国国家卫生研究院;

关键词：

D O I：

10.1016/0022-3093(96)00102-0

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Large two-dimensional amorphous silicon image sensor arrays offer an advantage for high speed document scanning and medical X-ray imaging. We describe our page sized 200 spot per inch imager and the accompanying high speed readout electronics. The spatial resolution performance for white light and X-ray imaging is illustrated. We discuss how the important issues of noise and resolution depend on the properties of a-Si:H, and show how the material can be used to give improved performance of the imagers.

引用

页码：1151 / 1154

页数：4

共 6 条

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[6]

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