Interconnection of nanostructures using carbon nanotubes

被引:33
作者
Homma, Y
Yamashita, T
Kobayashi, Y
Ogino, T
机构
[1] NTT Corp, Basic Res Labs, Atsugi, Kanagawa 2430198, Japan
[2] Tokai Univ, Dept Mat Sci & Technol, Shizuoka 4100395, Japan
关键词
carbon nanotubes; interconnection; chemical vapour deposition; nanoparticle catalyst;
D O I
10.1016/S0921-4526(02)00872-4
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We propose a novel application of carbon nanotubes as a wiring materials for self-assembling nano-interconnections. We investigated nanotube growth on patterned silicon substrates as a model for interconnectional growth. The growth was performed by methane chemical vapour deposition with an iron-oxide nanoparticle catalyst. Nanotubes originating from the top of a mesa grew laterally, bridging one mesa after another. A nanotube network was seen among an array of mesas. These results demonstrate the possibility of self-assembled wiring. (C) 2002 Published by Elsevier Science B.V.
引用
收藏
页码:122 / 123
页数:2
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