Superstoichiometric PVD carbide coatings

被引：14

作者：

Knotek, O

Lugscheider, E

Loffler, F

Bosserhoff, B

Schmitz, S

机构：

[1] Materials Science Institute, Aachen University of Technology, Aachen

来源：

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING | 1996年 / 209卷 / 1-2期

关键词：

mechanical properties; carbide coatings; tribological properties;

D O I：

10.1016/0921-5093(95)10122-5

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

In recent years a number of developments have been made in the field of hydrogen-containing carbon coatings. These coatings are well known because of their low friction coefficient, e.g. against steel, they have many applications such as friction and wear-reduced coatings for machine parts. These coatings can be deposited by PVD methods. A stabilization of these PVD-processes is possible if a metal component is added to the process. In this case a metallic target, e.g. titanium, is vapourized in a carbon and hydrogen atmosphere. Many workers have studied the carbon-rich side of the system for low friction applications, but superstoichiometric films in the rang of about 50-60 at. % carbon also show interesting properties. The investigated systems are Si-C, Ta-C and Ti-C. In this paper the mechanical properties (hardness, critical load), microstructure (XRD, SEM) and the tribological properties (Pin-On-Disk Test) of these carbide coatings will be presented and discussed.

引用

页码：394 / 398

页数：5