Ordering and shape of self-assembled InAs quantum dots on GaAs(001)

被引:34
作者
Zhang, K
Heyn, C
Hansen, W
Schmidt, T
Falta, J
机构
[1] Univ Hamburg, Inst Angew Phys, D-20355 Hamburg, Germany
[2] DESY, HASYLAB, D-22603 Hamburg, Germany
关键词
D O I
10.1063/1.126305
中图分类号
O59 [应用物理学];
学科分类号
摘要
Quantitative grazing-incidence small-angle x-ray scattering experiments have been performed on self-assembled InAs quantum dots (QDs) grown by molecular-beam epitaxy. We find pronounced nonspecular diffuse scattering satellite peaks with high diffraction orders, indicating a lateral ordering in the spatial positions of the InAs QDs. The mean-dot-dot distance and correlation lengths of the dot lateral distribution are found to be anisotropic. We observe the sharpest dot distribution in the [110] direction. Additional broad diffraction peaks are observed and associated with dot facet crystal truncation rods of the {111} and {101} facet families. This suggests an octagonal-based dot shape. (C) 2000 American Institute of Physics. [S0003-6951(00)02716-9].
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页码:2229 / 2231
页数:3
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