A modified surface of titanium and its vacuum characteristic

被引：4

作者：

Homma, T ^{[1
]}

Minato, M ^{[1
]}

Itoh, Y ^{[1
]}

Akiya, S ^{[1
]}

Suzuki, T ^{[1
]}

机构：

[1] VACUUM MET CO LTD, CHIBA, JAPAN

来源：

APPLIED SURFACE SCIENCE | 1996年 / 100卷

关键词：

D O I：

10.1016/0169-4332(96)00284-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Vacuum characteristic of pure Ti surface modified by such different methods as buffing (BP), chemical (CP) and mechano-chemical (MCP) polishing was compared by using thermal desorption spectroscopy. A characterization of the modified surface was made with scanning electron microscopy to measure electron channelling pattern and profilometry roughness. We report a comparison of thermal desorption aspects in correlating with the modified surface. An outgassing measurement, using the through-put chamber of chemical polished, showed desorbed gasses dominated by not only H2O but also CO(N-2) and H-2.

引用

页码：189 / 192

页数：4

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