Chemical sensors with catalytic metal gates

被引：57

作者：

Lundstrom, I

Petersson, LG

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1996年 / 14卷 / 03期

关键词：

D O I：

10.1116/1.580292

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We first review the principles of gas sensitive field effect devices with catalytic metal gates. A discussion about recent experiments under ultrahigh vacuum conditions is given. More particularly, we consider the properties of the interface between the catalytic metal and the insulator it is evaporated on. A few more of the applied research areas related to these devices are also discussed and some remaining research problems are suggested. (C) 1996 American Vacuum Society.

引用

页码：1539 / 1545

页数：7

共 27 条

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