Numerical modeling of micromechanical devices using the direct simulation Monte Carlo method

A direct simulation Monte Carlo (DSMC) investigation of flows related to microelectromechanical systems (MEMS) is detailed This effort is intended to provide tools to facilitate the design and optimization of micro-devices as well as to probe the effects of rarefaction, especially in regimes not amenable to other means of analysis. The code written for this purpose employs an unstructured grid, a trajectory-tracing particle movement scheme, and an ''infinite channel'' boundary formulation. Its results for slip-flow and transition regime micro-channels and a micro-nozzle are presented to demonstrate its capabilities.