Cobalt-palladium and cobalt-platinum bilayer films formed by chemical vapor deposition

被引:24
作者
Choi, SWK [1 ]
Puddephatt, RJ [1 ]
机构
[1] UNIV WESTERN ONTARIO,DEPT CHEM,LONDON,ON N6A 5B7,CANADA
关键词
D O I
10.1021/cm9605779
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The complexes [Co-3(CO)(9)CCl], [Co-3(CO)(9)CH], [Co-2(CO)(6)(HC=CPh)] and [Co-2(CO)(6)(HC+C-t-Bu)] are shown to be excellent precursors for CVD of pure cobalt films, when using hydrogen as carrier gas. These compounds all possess good air and moisture stability, have high volatility, and are easy to prepare, store, and handle. Using these precursors and the known palladium and platinum precursors [Pd(hfac)(2)] and [PtMe2(COD)], it has been shown that bilayer films glass/Co/Pd, glass/Pd/Co, glass/Co/Pt, and glass/Pt/Co can be grown easily. There is a sharp boundary and good adhesion between the two metal layers, suggesting that this method may be suitable for the formation of bilayer films for magnetooptical applications.
引用
收藏
页码:1191 / 1195
页数:5
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