Surface wave eigenmodes in a finite-area plane microwave plasma

被引：78

作者：

Ghanashev, I

Nagatsu, M

Sugai, H

机构：

[1] Department of Electrical Engineering, Faculty of Engineering, Nagoya University, Chikusa-ku, Nagoya 464-01, Furo-cho

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 1A期

关键词：

electromagnetic waves; surface waves; microwave discharges; plasma processing;

D O I：

10.1143/JJAP.36.337

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The resonance frequencies of electromagnetic surface modes propagating along a plane dielectric-plasma interface are computed, taking into account the finite area of the latter. The analysis results in simple analytical formulae for estimating the plasma density at which a given mode can be expected to occur for given geometry and wave frequency. Comparison with measurements in large-area circular plasmas is made.

引用

页码：337 / 344

页数：8

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