Oxygen tracer and oxygen chemical diffusion coefficients have been determined for single crystalline SrTiO3 under defined temperature (f), oxygen partial pressure (p(O-2)), and acceptor (m(Fe)) dopant concentration (m(Fe)) conditions. Oxygen tracer diffusion results were obtained (873 K less than or equal to T less than or equal to 1173 K, p(O-2)= 10(5) Pa) by means of O-18 isotope exchange with subsequent analysis of the O-18 in-diffusion profiles by secondary ion mass spectrometry (SIMS). In the case of chemical diffusion an in situ and spatially resolved, optical relaxation technique was applied (673 K less than or equal to T less than or equal to 973 K, 10 Pa less than or equal to P(O-2) less than or equal to 10(5) Pa). The dopant concentration in both experiments was varied between 4.3 X 10(18) cm(-3) less than or equal to m(Fe) less than or equal to 4.9 X 10(19) cm(-3). The evaluation of (ex situ) tracer and (in situ) concentration profiles are shown to be in excellent agreement with defect chemical calculations. In contrast to the tracer diffusion coefficients (D*) the chemical diffusion coefficients (D-delta) are sensitive to ionic-electronic (short-range) defect interactions (internal buffer effects influence the thermodynamic factor) caused by valence changes of the redox-active Fe-doping. (C) 2000 Elsevier Science Ltd. All rights reserved.