Vertical cavity surface emitting lasers incorporating structured mirrors patterned by electron-beam lithography

We demonstrate the operation of bottom-emitting vertical cavity surface-emitting lasers (VCSELs) with linear mode polarization which is controlled in an arbitrary orientation by the use of patterned metallic mirrors on top of the VCSEL surface. The top mirror is made in the shape of a 200 nm pitch grating, composed of alternating high reflectivity (Au) and low reflectivity (Cr) metal lines, whose orientation determines the polarization of the laser made. The gratings were fabricated by high-resolution (<50 nm) electron-beam lithography and lift-off technique, and were aligned with the other parts of the VCSEL structure (top electrode, ion-implanted zone) fabricated by conventional photolithography. Various types of mirror shapes and sizes were fabricated, including square and circular grating envelopes, as well as circular mirrors with an average (radial) Gaussian reflectivity. (C) 1999 American Vacuum Society. [S0734-211X(99)06506-3].