Study of the microscopic surface structure of a quartz substrate for surface acoustic wave devices

被引：4

作者：

Noge, S

Araki, N

Komine, K

Suzuki, H

Shiraishi, H

Hohkawa, K

机构：

[1] MEIDENSHA CORP,ADV TECHNOL RES LAB,SHINAGAWA KU,TOKYO 141,JAPAN

[2] MEIDENSHA CORP,YONEZAWA FACTORY,YONEZAWA,YAMAGATA 992,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 5B期

关键词：

surface acoustic wave; quartz substrate; damage layer; crystallography; atomic force microscopy;

D O I：

10.1143/JJAP.36.3081

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper describes the results of investigating the microscopic features of a commercially available 35 degrees-rotated Y-cut (ST-cut) quartz surface using atomic force microscopy (AFM) and X-ray diffraction analysis, X-ray diffraction analysis suggests that distortions in the peaks are due to the existence of a, dislocation or plane slip near the surface, but precise analysis was impossible in this experiment. Data from AFM showed that a flat area with an interesting particle image exists on the surface along with a heterogeneous damage layer at a depth of about 30 nm.

引用

页码：3081 / 3086

页数：6