共 53 条
[1]
Spanning the length scales in dynamic simulation
[J].
COMPUTERS IN PHYSICS,
1998, 12 (06)
:538-546
[5]
Comparison of resist collapse properties for deep ultraviolet and 193 nm resist platforms
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
2000, 18 (06)
:3303-3307
[10]
A new intermolecular potential model for the n-alkane homologous series
[J].
JOURNAL OF PHYSICAL CHEMISTRY B,
1999, 103 (30)
:6314-6322