Microfluidic method for in-situ deposition and precision patterning of thin-film metals on curved surfaces

被引：29

作者：

Goluch, ED ^{[1
]}

Shaikh, KA ^{[1
]}

Ryu, K ^{[1
]}

Chen, J ^{[1
]}

Engel, J ^{[1
]}

Liu, C ^{[1
]}

机构：

[1] Univ Illinois, Micro & Nanotechnol Lab, Urbana, IL 61801 USA

来源：

APPLIED PHYSICS LETTERS | 2004年 / 85卷 / 16期

关键词：

D O I：

10.1063/1.1808872

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We present a technique for patterning thin-film metals (silver and gold) without the need for photolithography. The technique involves microfluidics and can be performed on planar or curved surfaces. Patterns of thin-film metal are fabricated by flowing electroless silver or gold plating solutions through predefined microchannels made of polydimethylsiloxane sealed against a surface of interest. We demonstrate metal resistors with 100-mum-wide traces fabricated on planar and curved surfaces. The surface profile, mechanical gauge factor, and temperature coefficient of resistance have been characterized. Application of the resistors as hot-wire flow sensors has also been demonstrated. (C) 2004 American Institute of Physics.

引用

页码：3629 / 3631

页数：3

共 18 条

[1] Selective electroless and electrolytic deposition of metal for applications in microfluidics: Fabrication of a microthermocouple [J].

Allen, PB ;

Rodriguez, I ;

Kuyper, CL ;

Lorenz, RM ;

Spicar-Mihalic, P ;

Kuo, JS ;

Chiu, DT .

ANALYTICAL CHEMISTRY, 2003, 75 (07) :1578-1583

[2]

Blickenstaff SB, 2003, IEEE LEOS ANN MTG, P700

[3] Rapid prototyping of microfluidic systems in poly(dimethylsiloxane) [J].

Duffy, DC ;

McDonald, JC ;

Schueller, OJA ;

Whitesides, GM .

ANALYTICAL CHEMISTRY, 1998, 70 (23) :4974-4984

[4] Three-dimensional metallic microstructures fabricated by soft lithography and microelectrodeposition [J].

Jackman, RJ ;

Brittain, ST ;

Adams, A ;

Wu, HK ;

Prentiss, MG ;

Whitesides, S ;

Whitesides, GM .

LANGMUIR, 1999, 15 (03) :826-836

[5]

Jacobsen S. C., 1991, Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots (Cat. No.91CH2957-9), P45, DOI 10.1109/MEMSYS.1991.114767

[6] Microfabrication inside capillaries using multiphase laminar flow patterning [J].

Kenis, PJA ;

Ismagilov, RF ;

Whitesides, GM .

SCIENCE, 1999, 285 (5424) :83-85

[7] Fabrication inside microchannels using fluid flow [J].

Kenis, PJA ;

Ismagilov, RF ;

Takayama, S ;

Whitesides, GM ;

Li, SL ;

White, HS .

ACCOUNTS OF CHEMICAL RESEARCH, 2000, 33 (12) :841-847

[8] POLYMER MICROSTRUCTURES FORMED BY MOLDING IN CAPILLARIES [J].

KIM, E ;

XIA, YN ;

WHITESIDES, GM .

NATURE, 1995, 376 (6541) :581-584

[9]

Kovacs G.T., 1998, Micromachined Transducers Sourcebook

[10]

LI JC, 1998, CHINESE J MECH ENG, V11, P29

← 1 2 →