Deposition of BN coatings by spraying a powder accelerated electrodynamically in a coaxial pulse plasma generator

被引:5
作者
Olszyna, A
机构
[1] Dept. of Mat. Science and Technology, Warsaw University and Technology, 02-524 Warsaw
关键词
boron nitride; plasma processing and deposition;
D O I
10.1016/0040-6090(95)08005-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Coatings of boron nitride were deposited by spraying a h-BN powder accelerated electrodynamically in a coaxial pulse plasma generator. The coatings were deposited on non-heated silicon substrates, which were, however, heated by the pulse plasma itself. The phase identification performed in this experiment has shown that, under the conditions prevailing during the deposition process, the h-BN powder underwent transformation to form the metastable E-BN phase.
引用
收藏
页码:79 / 82
页数:4
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