Spin-coating technology of the cover layer for digital video recording-blue disc

被引:7
作者
Komaki, T [1 ]
Hirata, H [1 ]
Usami, M [1 ]
Ushida, T [1 ]
Hayashida, N [1 ]
Inoue, H [1 ]
Kato, T [1 ]
Shingai, H [1 ]
Utsunomiya, H [1 ]
机构
[1] TDK Corp, Opt Device Dept, Device Dev, Data Storage Technol Ctr, Nagano 3850009, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 6A期
关键词
spin-coating; cover layer; UV-curable resin; phase change; blue laser;
D O I
10.1143/JJAP.41.3922
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have achieved the cover layer thickness distribution of 100 +/- 1.5 mum on a disc by improving the spin-coating method and developing an original spin-coating machine. The small skew of the disc is achieved by using a newly developed UV-curable resin.
引用
收藏
页码:3922 / 3923
页数:2
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