Micromachined deformable mirrors for adaptive optics

被引：38

作者：

Bifano, T ^{[1
]}

Perreault, J ^{[1
]}

Bierden, P ^{[1
]}

Dimas, C ^{[1
]}

机构：

[1] Boston Univ, Boston, MA 02215 USA

来源：

HIGH-RESOLUTION WAVEFRONT CONTROL: METHODS, DEVICES, AND APPLICATIONS IV | 2002年 / 4825卷

关键词：

adaptive optics; deformable mirrors; wavefront control; MEMS;

D O I：

10.1117/12.457847

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Recent progress on deformable mirror systems made at Boston University and Boston Micromachines Corporation is described. The mirror's optical, electrical, and mechanical performance characteristics are summarized, and the effects of air damping on performance are described. Two applications that have employed the muDM in laser communications and retinal imaging are introduced.

引用

页码：10 / 13

页数：4

共 6 条

[1] Microelectromechanical deformable mirrors [J].