Single process to deposit lead zirconate titanate (PZT) thin film by a hydrothermal method

被引：84

作者：

Morita, T ^{[1
]}

Kanda, T ^{[1
]}

Yamagata, Y ^{[1
]}

Kurosawa, M ^{[1
]}

Higuchi, T ^{[1
]}

机构：

[1] KANAGAWA ACAD SCI & TECHNOL,HIYUCHI ULTIMATE MECHATRON PROJECT,TAKATU KU,KANAGAWA 213,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1997年 / 36卷 / 5B期

关键词：

hydrothermal method; PZT thin film; piezoelectric material; piezoelectric transducer;

D O I：

10.1143/JJAP.36.2998

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The hydrothermal method to deposit lead zirconate titanate (PZT) thin film is anew method reported by Tsurumi et al. in 1991. This method consists of two linked processes. We have found that the film deposited by the first process is not PZT but separated lead zirconate (PZ) and lead titanate (PT). In this paper, we report that a PZT thin film was successfully deposited by a single process. The chemical construction and composition of the film were analyzed. The Zr/(Zr+Ti) ratio of the PZT film was controlled by changing the ionic composition of the solution.

引用

页码：2998 / 2999

页数：2

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