Deposition of highly oriented ZnO films by spray pyrolysis and their structural, optical and electrical characterization

被引:86
作者
Lokhande, BJ [1 ]
Patil, PS
Uplane, MD
机构
[1] Shivaji Univ, Thin Film Phys Lab, Dept Elect, Kolhapur, Maharashtra, India
[2] Shivaji Univ, Dept Phys, Kolhapur 416004, Maharashtra, India
关键词
zinc oxide; semiconductor; characterization;
D O I
10.1016/S0167-577X(02)00832-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Thin films of zinc oxide (ZnO) have been deposited onto glass substrates using a simple and inexpensive spray pyrolysis technique. A nonaqueous methanolic solution of zinc acetate was used as a spraying solution. The concentration of the solution was varied between 0.025 to 0.4 M. The films prepared at different solution concentrations were uniform and well adherent to the substrates. X-ray diffraction (XRD) studies showed that all the films were polycrystalline having hexagonal wurtzite-type crystal structure with strong orientation along (002) plane except 0.025 M, which exhibits a strong orientation in along (100) plane. The bandgap energy, electrical resistivity and thermoelectric power of the films were found to be dependent on the solution concentration. As solution concentration increases, the bandgap energy attenuates from 3.33 to 3.24 eV. The room temperature electrical resistivity was found to be vary in the range 10(2) to 10 (- 3) Omega cm, whereas thermoelectric power increases from 1 x 10 (- 6) to 8 x 10 (- 5) V/K. All the films showed n-type conductivity as evidenced from thermoelectric power (TEP) measurement. (C) 2002 Published by Elsevier Science B.V
引用
收藏
页码:573 / 579
页数:7
相关论文
共 24 条
[1]  
Bae HY, 1999, SENSOR ACTUAT B-CHEM, V55, P47, DOI 10.1016/S0925-4005(99)00038-6
[2]  
BELGHIT K, 1991, P 10 EC PHOT SOL EN, P613
[3]  
Caillaud F., 1990, Journal of the European Ceramic Society, V6, P313, DOI 10.1016/0955-2219(90)90022-8
[4]   PREPARATION AND PROPERTIES OF THIN-FILMS OF ZNO FOR HYPERSONIC TRANSDUCERS [J].
CHERNETS, AN ;
KENIGSBERG, NL .
THIN SOLID FILMS, 1973, 18 (02) :247-255
[5]   TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].
CHOPRA, KL ;
MAJOR, S ;
PANDYA, DK .
THIN SOLID FILMS, 1983, 102 (01) :1-46
[6]   DEVELOPMENT OF TRANSPARENT AND CONDUCTIVE ZNO FILMS BY SPRAY PYROLYSIS [J].
GOYAL, DJ ;
AGASHE, C ;
TAKWALE, MG ;
MARATHE, BR ;
BHIDE, VG .
JOURNAL OF MATERIALS SCIENCE, 1992, 27 (17) :4705-4708
[7]  
Guillemoles J.-F., 1991, Tenth E.C. Photovoltaic Solar Energy Conference. Proceedings of the International Conference, P609
[8]  
JEORGE J, SOLID STATE COMMUN, V33, P987
[9]   Optical and electrical properties of zinc oxide films prepared by spray pyrolysis [J].
Joseph, B ;
Gopchandran, KG ;
Manoj, PK ;
Koshy, P ;
Vaidyan, VK .
BULLETIN OF MATERIALS SCIENCE, 1999, 22 (05) :921-926
[10]  
Kang XY, 1997, MATER RES BULL, V32, P1165, DOI 10.1016/S0025-5408(97)00091-3